High-precision positioning unit

SKF positioning systems designed a series of compact cross tables that are driven with ironless linearmotors. High guiding / positioning accuracy and high dynamic lead to a perfect solution for wafer measurement. The free area through the whole unit optimizes the mounting position of the measurement device.

Main features

• Drive forces up to 264N for upper axis and 603N for lower axis
• Mechanical stroke up to 308mm
• Speed up to 1,5m/s
• Acceleration up to 30m/s2
• Ironless linear motor
• Moving magnets for easier cabling
• One flat cable per axis for all connections
• Optical measurement system
with integrated limit switches
• Precision cross roller rail guides with patented Anti cage Creeping System (ACS)
• Available in aluminum and cast iron