SKF positioning systems designed a series of compact cross tables that are driven with ironless linearmotors. High guiding / positioning accuracy and high dynamic lead to a perfect solution for wafer measurement. The free area through the whole unit optimizes the mounting position of the measurement device.

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TLM400 Compact cross table, linearmotor driven	Compact cross tables linearmotor driven
TLM300 Compact cross table, linearmotor driven	Compact cross tables linearmotor driven